Formula: CHF3 or R23, Halocarbon 23

Trifluoromethane is a colorless, nontoxic, non-flammable gas with a slightly ethereal odor. Contact with liquid may cause frostbite. It is shipped as a liquefied gas under its own vapor pressure (635 psig @ 70° F).

Applications

Halocarbon 23 is often used in combination with halocarbon 14 and halocarbon 116 to improve etching rate and selectivity and uniformity in etching.

Grade 3 Grade 3.5 Grade 4.5 Grade 5
Purity 99.9% 99.95% 99.995% 99.999%
Air (N2+O2+CO+CO2) < 500 ppmv < 400 ppmv < 30 ppmv <5 ppmv
Moisture < 10 ppm/w < 10 ppmv < 4 ppmv < 2 ppmv
Other Organics <  1000 ppmv < 10 ppmv < 3 ppmv
Methane < 1 ppmv
Acidity (HCL) <  0.1 ppm/w <  0.1 ppm/w < 1 ppm/w < 0.1 ppm/w

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.                                       
All concentrations are on a mol/mol basis unless otherwise stated.                                          
Product sold on the basis of total impurities. Individual impurities may vary slightly.           

Chemical & Physical Properties
Molecular Weight 70.01
Specific Volume 5.5 cu. ft/lb
Pressure @ 70° F 635 psig
Valve Outlet CGA 660
CGA 320, DISS 716

 

Shipping Information
DOT Name Trifluoromethane
Hazard Class 2.2
DOT No. UN 1984
DOT Label Green, Non-Flammable Gas
CAS No. 75-46-7

Cylinder Size Fill Weight (lbs)
44L/Size 200 70
16L/Size 80 25
7L/Size 35 11