This gas not available for purchase online.
Formula: CF4
or R14, Halocarbon 14
Tetrafluoromethane is a colorless, nonflammable, noncorrosive gas. It is normally compressed and shipped at high pressure.
Applications
Halocarbon 14 is combined with oxygen to etch polysilicon, silicon dioxide, silicon nitrite, some metals and metal silicides. It can be combined with halocarbon 116 or used alone to clean wafers and chambers.
| Grade 4 | Grade 4.5 | Grade 5 | |
|---|---|---|---|
| Purity | 99.99% | 99.995% | 99.999% |
| Nitrogen | < 60 ppmv | < 30 ppmv | < 5 ppmv |
| Oxygen | < 20 ppmv | < 5 ppmv | < 1 ppmv |
| Carbon Monoxide | < 5 ppmv | < 1 ppmv | < 0.5 ppmv |
| Carbon Dioxide | < 5 ppmv | < 1 ppmv | < 0.5 ppmv |
| Moisture | < 5 ppmv | < 5 ppmv | < 2 ppmv |
| Halocarbon 116 | < 1 ppmv | ||
| Other Halocarbons | < 5 ppmv | < 5 ppmv | |
| Sulfur Hexafluoride | |||
| Hydrocarbons | < 1 ppmv | ||
| Acidity (HF) | < 0.1 ppm/w | < 0.1 ppm/w | < 0.1 ppm/w |
**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.
| Chemical & Physical Properties | |
| Molecular Weight | 88.01 |
| Specific Volume | 4.39cu. ft/lb |
| Pressure @ 70° F | 2000 psig |
| Valve Outlet | CGA 580 CGA 320 |
| Shipping Information | |
| DOT Name | Tetrafluoromethane |
| Hazard Class | 2.2 |
| DOT No. | UN 1982 |
| DOT Label | Green, Non-Flammable Gas B |
| CAS No. | 75-73-0 |
| Cylinder Size | Fill Weight (lbs) |
| 49L/Size 300 | 72 |
| 44L/Size 200 | 70 |
| 16L/Size 80 | 25 |
| 7L/Size 35 | 11 |
