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Formula: CF4 or R14, Halocarbon 14

Tetrafluoromethane is a colorless, nonflammable, noncorrosive gas. It is normally compressed and shipped at high pressure.

Applications

Halocarbon 14 is combined with oxygen to etch polysilicon, silicon dioxide, silicon nitrite, some metals and metal silicides. It can be combined with halocarbon 116 or used alone to clean wafers and chambers.

Grade 4 Grade 4.5 Grade 5
Purity 99.99% 99.995% 99.999%
Nitrogen < 60 ppmv < 30 ppmv < 5 ppmv
Oxygen < 20 ppmv < 5 ppmv < 1 ppmv
Carbon Monoxide < 5 ppmv < 1 ppmv < 0.5 ppmv
Carbon Dioxide < 5 ppmv < 1 ppmv < 0.5 ppmv
Moisture < 5 ppmv < 5 ppmv < 2 ppmv
Halocarbon 116 < 1 ppmv
Other Halocarbons < 5 ppmv < 5 ppmv
Sulfur Hexafluoride
Hydrocarbons < 1 ppmv
Acidity (HF) < 0.1 ppm/w < 0.1 ppm/w < 0.1 ppm/w

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.

Chemical & Physical Properties
Molecular Weight 88.01
Specific Volume 4.39cu. ft/lb
Pressure @ 70° F 2000 psig
Valve Outlet CGA 580
CGA 320

 

Shipping Information
DOT Name Tetrafluoromethane
Hazard Class 2.2
DOT No. UN 1982
DOT Label Green, Non-Flammable Gas B
CAS No. 75-73-0

 

Cylinder Size Fill Weight (lbs)
49L/Size 300 72
44L/Size 200 70
16L/Size 80 25
7L/Size 35 11