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Formula: CH2F2 or R32, Halocarbon 32

Difluoromethane is a colorless, flammable gas with a slight ether-like odor. It is shipped as a liquefied gas under its own vapor pressure (207 psig @ 70° F).

Applications

Halocarbon 32 is used for plasma etching and disassociates into reactive fluoride ions in the presence of an RF field.

Grade 3 Grade 4
Purity 99.9% 99.99%
Nitrogen < 300 ppmv < 40 ppmv
Oxygen < 50 ppmv < 10 ppmv
Carbon Dioxide < 5 ppmv
Moisture < 100 ppmv < 5 ppmv
Other Halocarbons < 60 ppmv
Acidity < 0.1 ppm/w
Other Organics  < 700 ppmv

**Moisture level guaranteed only when Electronic Fluorocarbons prepares the cylinders.
All concentrations are on a mol/mol basis unless otherwise stated.
Product sold on the basis of total impurities. Individual impurities may vary slightly.

Chemical & Physical Properties
Molecular Weight 52.02
Specific Volume 7.19 cu.ft/lb
Pressure @ 70° F 207 psig
Valve Outlet: CGA 350 CGA 350 DISS 724

 

Shipping Data
DOT Name Difluoromethane
Hazard Class 2.1
DOT No. UN 3252
DOT Label Red, Flammable Gas
CAS No. 75–10–5
Cylinder Size Fill Weight (lbs)
44L/Size 200 65
16L/Size 80 25
7L/Size 35 15