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Hexafluoro-1,3-butadiene (C4F6) is a colorless, odorless, flammable liquefied gas. Years of research have shown that C4F6 (H-2316) presents several advantages for dry etching of oxide-based materials: It has a higher etch rate and selectivity than octafluorocyclobutane (c-C4F8 – H318), another extensively used etchant for silicon oxide. Unlike C4F8 (H318), with C4F6 (H2316), only the … Continued
Hexafluoroethane, also known as Halocarbon 116 or perfluoroethane is a stable, nontoxic, nonflammable gas that is essential to three very different industries: semiconductor and microsystem manufacturing, refrigeration, and medical. In each industry, buyers appreciate different characteristics of the gas, but in both manufacturing and medical, purity is the greatest concern. Electronic Fluorocarbons provides C2F6 … Continued
A colorless, nonflammable gas, tetrafluoromethane-also known as halocarbon 14 or carbon tetrafluoride- is known as the simplest fluorocarbon because it consists of one carbon atom in the middle that binds to four fluorine atoms around the outside (CF4). However, its uses are anything but simple. CF4 has a very low boiling point (‑128°C, ‑202°F), defining it … Continued
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